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说明
Configured for 6" Wafers Standard Chuck LAM RESEARCH 13.56 MHz RF Power Source MKS Type 651 Pressure Controller UNIT Model UPC 1300 – HE 50 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 100 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 500 sccm Software Version V3.11配置
无配置OEM 型号描述
未提供文件
无文件
DRYTEK
384T
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
19861
晶圆尺寸：
未知
年份：
未知
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说明
Configured for 6" Wafers Standard Chuck LAM RESEARCH 13.56 MHz RF Power Source MKS Type 651 Pressure Controller UNIT Model UPC 1300 – HE 50 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 100 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 500 sccm TYLAN Model FC-280S – N2 1 slpm TYLAN Model FC-280S – N2 500 sccm Software Version V3.11配置
无配置OEM 型号描述
未提供文件
无文件