说明
1. Software abnormal Pending processing ( The machine screen is unresponsive. A bunch of alarm) 2. EC magnetron generator 3. AC magnetron generator 4. EC TMP and TMP controller 5. BR dry pump 6. AC dry pump 7. LC UC Motor 8. chiller 9.EC Dry pump A30W 10.PM parts lackEC WAFER CLAMP 11.PM parts lack EC ELECTRODE COVER 12.PM parts lack EC GROUND ELECTRODE配置
无配置OEM 型号描述
未提供文件
无文件
HITACHI
M-308ATE
类别
Dry / Plasma Etch
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
142660
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
1. Software abnormal Pending processing ( The machine screen is unresponsive. A bunch of alarm) 2. EC magnetron generator 3. AC magnetron generator 4. EC TMP and TMP controller 5. BR dry pump 6. AC dry pump 7. LC UC Motor 8. chiller 9.EC Dry pump A30W 10.PM parts lackEC WAFER CLAMP 11.PM parts lack EC ELECTRODE COVER 12.PM parts lack EC GROUND ELECTRODE配置
无配置OEM 型号描述
未提供文件
无文件