跳至主要内容
6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
Moov logo

6" Fab For Sale from Moov - Click Here to Learn More
Moov Icon
LAM RESEARCH CORPORATION RAINBOW 4420
    说明
    Plasma Etch
    配置
    Install Type: Thru-the-wall (TTW) Status Lamp System software (App): Envision ver1.5.1 SECS I Interface Cassette Interface: (2) Hine 38F indexers Electrostatic Chuck (ESC) Endpoint Detection: Monochromator 405nm / 520nm Turbo: Seiko Seiki STP H200C RF Match Type: LAM On-board RF Generators: No RF Generator: ENI OEM-650A RF Hours: 402056 Remote RF Cart: No ATM Passivation Module: No Plasma LLK (PLL): No High Conductance Manifold: No Gas Box: Remote gas Box: No Orbitally welded GB: Yes Backside cooling MFC: Unit 1250A Gases: #1: N2, 200 sccm, Unit 1200A #2: CHF3, 50 sccm, Unit 1200A #3: N2, 300 sccm, Aera #4: N2, 500 sccm, Unit UFC 1660 #5: CF4, 150 sccm, Unit 1200A #6: SF6, 150 sccm, Unit 1200A #7: He, 1 slm, Unit UFC 1660 #8: O2, 200 sccm, Unit UFC 1660 Pump: Heated pumping manifolds: No Pump controller: iQ Series Entrance / Exit: Edwards iQDP-40 Main: Edwards iQDP-80 Chiller(s): (2) SMC HRS018-WN-20-M On-board AC Distribution type: Fused Power requirements: 208VAC, 3-Phase, 5-Wire
    OEM 型号描述
    The LRC Rainbow Etchers are fully automated, in-line, single-wafer plasma/RIE etching systems that processes 6-inch, or 8-inch wafers and features top or/and bottom powered electrode plate, programmable electrode spacing, and automatic noncontact wafer alignment and placement. Unique RF match networks are located at the upper and lower electrodes for programmable switching between plasma and RIE modes. Designed for continuous operation, the LRC Rainbow etchers are computer-controlled, allowing either manual or automatic control. The Lam Rainbow 44XX Series can be for Tungsten silicide, Silicon nitride, polysilicon ,oxide, Crystallise Si etc.
    文件

    无文件

    LAM RESEARCH CORPORATION

    RAINBOW 4420

    verified-listing-icon

    已验证

    类别
    Dry / Plasma Etch

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    63314


    晶圆尺寸:

    8"/200mm


    年份:

    1993


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    类似上架物品
    查看全部
    LAM RESEARCH CORPORATION RAINBOW 4420

    LAM RESEARCH CORPORATION

    RAINBOW 4420

    Dry / Plasma Etch
    年份: 0状况: 翻新
    上次验证60 多天前

    LAM RESEARCH CORPORATION

    RAINBOW 4420

    verified-listing-icon
    已验证
    类别
    Dry / Plasma Etch
    上次验证: 60 多天前
    listing-photo-5111deec793545edb0e504079a78b326-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/43570/5111deec793545edb0e504079a78b326/8af0de4a0b6a44f0b7d3e68908aa18d6_c32f11279e93444ebe59a56697a5ee981201a_mw.jpeg
    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    63314


    晶圆尺寸:

    8"/200mm


    年份:

    1993


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    Plasma Etch
    配置
    Install Type: Thru-the-wall (TTW) Status Lamp System software (App): Envision ver1.5.1 SECS I Interface Cassette Interface: (2) Hine 38F indexers Electrostatic Chuck (ESC) Endpoint Detection: Monochromator 405nm / 520nm Turbo: Seiko Seiki STP H200C RF Match Type: LAM On-board RF Generators: No RF Generator: ENI OEM-650A RF Hours: 402056 Remote RF Cart: No ATM Passivation Module: No Plasma LLK (PLL): No High Conductance Manifold: No Gas Box: Remote gas Box: No Orbitally welded GB: Yes Backside cooling MFC: Unit 1250A Gases: #1: N2, 200 sccm, Unit 1200A #2: CHF3, 50 sccm, Unit 1200A #3: N2, 300 sccm, Aera #4: N2, 500 sccm, Unit UFC 1660 #5: CF4, 150 sccm, Unit 1200A #6: SF6, 150 sccm, Unit 1200A #7: He, 1 slm, Unit UFC 1660 #8: O2, 200 sccm, Unit UFC 1660 Pump: Heated pumping manifolds: No Pump controller: iQ Series Entrance / Exit: Edwards iQDP-40 Main: Edwards iQDP-80 Chiller(s): (2) SMC HRS018-WN-20-M On-board AC Distribution type: Fused Power requirements: 208VAC, 3-Phase, 5-Wire
    OEM 型号描述
    The LRC Rainbow Etchers are fully automated, in-line, single-wafer plasma/RIE etching systems that processes 6-inch, or 8-inch wafers and features top or/and bottom powered electrode plate, programmable electrode spacing, and automatic noncontact wafer alignment and placement. Unique RF match networks are located at the upper and lower electrodes for programmable switching between plasma and RIE modes. Designed for continuous operation, the LRC Rainbow etchers are computer-controlled, allowing either manual or automatic control. The Lam Rainbow 44XX Series can be for Tungsten silicide, Silicon nitride, polysilicon ,oxide, Crystallise Si etc.
    文件

    无文件

    类似上架物品
    查看全部
    LAM RESEARCH CORPORATION RAINBOW 4420

    LAM RESEARCH CORPORATION

    RAINBOW 4420

    Dry / Plasma Etch年份: 0状况: 翻新上次验证:60 多天前
    LAM RESEARCH CORPORATION RAINBOW 4420

    LAM RESEARCH CORPORATION

    RAINBOW 4420

    Dry / Plasma Etch年份: 0状况: 二手上次验证:60 多天前
    LAM RESEARCH CORPORATION RAINBOW 4420

    LAM RESEARCH CORPORATION

    RAINBOW 4420

    Dry / Plasma Etch年份: 0状况: 二手上次验证:60 多天前