说明
New and unused; the process modul is still in their original packaging.配置
Product Description for Exelan Flex 45 - 2300 Exelan Flex 45 CFE PM, 200 mm - Top PI Chamber Manometer Baffle - Barrier Seal Door on VAT Rocker - 1600 L/s Edwards - 2300 Exelan Flex 45 Quick Clean kit w/e - 2300 Exelan Flex 45 Pend. Valve kit - 2300 Exelan Flex 45 RF Maintenance kit - 2300 Exelan Flex 45 Service Tool kit - 2300 Exelan Flex 45 Jetstream Gas Box - 2300 JetStream Gas Box - 9 Gas Configuration (JetStream) - JetStream Gas Line - Remote Interface Box (per line) - Remote Interface Box (per PM) - 2300 PeripheralsOEM 型号描述
未提供文件
无文件
类别
Dry / Plasma Etch
上次验证： 5 天前
物品主要详细信息
状况：
New
运行状况:
Deinstalled / Crated
产品编号：
145038
晶圆尺寸：
8"/200mm
Gas Lines:
O2, C4F8, CH2F2, CF4, C4F6, CO, N2, Ar, SF6, CH3F, O2, H2, N2
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
2300 EXELAN FLEX45
类别
Dry / Plasma Etch
上次验证： 5 天前
物品主要详细信息
状况：
New
运行状况:
Deinstalled / Crated
产品编号：
145038
晶圆尺寸：
8"/200mm
Gas Lines:
O2, C4F8, CH2F2, CF4, C4F6, CO, N2, Ar, SF6, CH3F, O2, H2, N2
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
New and unused; the process modul is still in their original packaging.配置
Product Description for Exelan Flex 45 - 2300 Exelan Flex 45 CFE PM, 200 mm - Top PI Chamber Manometer Baffle - Barrier Seal Door on VAT Rocker - 1600 L/s Edwards - 2300 Exelan Flex 45 Quick Clean kit w/e - 2300 Exelan Flex 45 Pend. Valve kit - 2300 Exelan Flex 45 RF Maintenance kit - 2300 Exelan Flex 45 Service Tool kit - 2300 Exelan Flex 45 Jetstream Gas Box - 2300 JetStream Gas Box - 9 Gas Configuration (JetStream) - JetStream Gas Line - Remote Interface Box (per line) - Remote Interface Box (per PM) - 2300 PeripheralsOEM 型号描述
未提供文件
无文件