说明
无说明配置
Type of Loadlock LAM Number of Process Chamber 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot NO User Interface FRONT UI Computer NO TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm NO Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control NO Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board NO Configuration of Process Module PM1 PM2 PM4 Model of Chamber 9400DSie 9400DSie 9400DSie Year of Construction 2010 2010 2010 Process Gauge NO NO NO Chamber Gauge NO NO NO Foreline Guage NO NO NO Pendulum valve NO NO YES Model of TMP NO NO NO Model of TMP Controller NO NO NO Model of TCP Generator(TOP) NO NO NO Model of Bias Generator(BOT) NO NO NO TCP Matcher YES YES YES Bias Matcher NO NO NO ESC/ chuck YES YES YES ESC Power Supply NO NO NO Backside Helium UPC YES YES YES VME Assembly NO NO NO Foreline Assembly NO NO NO OES NO NO NO Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPSOEM 型号描述
未提供文件
无文件
类别
Dry / Plasma Etch
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
145019
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
ALLIANCE A6 9400DSiE
类别
Dry / Plasma Etch
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
145019
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
Type of Loadlock LAM Number of Process Chamber 3 Chamber Configuration of Mainframe Signal Tower 3 Color Number Loadlock 2 Robot NO User Interface FRONT UI Computer NO TM Motherboard & Node Board YES Terminal Server YES EtherNet Hub YES Light Curtain N/A Transfer Robot Arm NO Gate Valve YES Loadlock gauge YES HPS TM Pressure Gauge YES HPS TM Pressure Control NO Airlock Pressure Gauge YES TM ISO Vlave YES HPS Slit Door YES TM VME Board NO Configuration of Process Module PM1 PM2 PM4 Model of Chamber 9400DSie 9400DSie 9400DSie Year of Construction 2010 2010 2010 Process Gauge NO NO NO Chamber Gauge NO NO NO Foreline Guage NO NO NO Pendulum valve NO NO YES Model of TMP NO NO NO Model of TMP Controller NO NO NO Model of TCP Generator(TOP) NO NO NO Model of Bias Generator(BOT) NO NO NO TCP Matcher YES YES YES Bias Matcher NO NO NO ESC/ chuck YES YES YES ESC Power Supply NO NO NO Backside Helium UPC YES YES YES VME Assembly NO NO NO Foreline Assembly NO NO NO OES NO NO NO Configuration of Power Rack Power 208VAC, 50/60Hz, Ф3, 272AMPSOEM 型号描述
未提供文件
无文件