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LAM RESEARCH CORPORATION RAINBOW 4520i
    说明
    ETCH
    配置
    ETCH
    OEM 型号描述
    The Rainbow® 4520i system is a single wafer, vacuum load-locked low pressure oxide system with two active processing chambers. It is designed for integrated isotropic/anisotropic profile on high aspect ratio contact and via structures. The Isotropic Module adds isotropic oxide etching capabilities to the existing anisotropic capabilities of the Rainbow 4520, providing excellent aluminum step coverage. The Isotropic Module is incorporated onto the entrance load-lock on the Rainbow 4520, requiring only one additional wafer handling step. Having two chambers on a single machine greatly reduces the possibility of cross contamination between processes, which minimizes wafer breakage and defect densities. The system has a high uptime of ≥ 85% and is capable of isotropic etching for dielectric (oxide) films. The Rainbow® 4520i system has several applications, including contact etch, planarization, via etch, trench mask etch, and pad etch.
    文件

    无文件

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    verified-listing-icon

    已验证

    类别
    Dry / Plasma Etch

    上次验证: 60 多天前

    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    83880


    晶圆尺寸:

    8"/200mm


    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    类似上架物品
    查看全部
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch
    年份: 0状况: 二手
    上次验证60 多天前

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    verified-listing-icon
    已验证
    类别
    Dry / Plasma Etch
    上次验证: 60 多天前
    listing-photo-25d65915c73d4fec973d9f50bc74ec0b-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
    物品主要详细信息

    状况:

    Used


    运行状况:

    未知


    产品编号:

    83880


    晶圆尺寸:

    8"/200mm


    年份:

    未知


    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    说明
    ETCH
    配置
    ETCH
    OEM 型号描述
    The Rainbow® 4520i system is a single wafer, vacuum load-locked low pressure oxide system with two active processing chambers. It is designed for integrated isotropic/anisotropic profile on high aspect ratio contact and via structures. The Isotropic Module adds isotropic oxide etching capabilities to the existing anisotropic capabilities of the Rainbow 4520, providing excellent aluminum step coverage. The Isotropic Module is incorporated onto the entrance load-lock on the Rainbow 4520, requiring only one additional wafer handling step. Having two chambers on a single machine greatly reduces the possibility of cross contamination between processes, which minimizes wafer breakage and defect densities. The system has a high uptime of ≥ 85% and is capable of isotropic etching for dielectric (oxide) films. The Rainbow® 4520i system has several applications, including contact etch, planarization, via etch, trench mask etch, and pad etch.
    文件

    无文件

    类似上架物品
    查看全部
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch年份: 0状况: 二手上次验证:60 多天前
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch年份: 0状况: 二手上次验证:60 多天前
    LAM RESEARCH CORPORATION RAINBOW 4520i

    LAM RESEARCH CORPORATION

    RAINBOW 4520i

    Dry / Plasma Etch年份: 0状况: 二手上次验证:60 多天前