说明
Poly Etcher配置
RF system, pressure control system and temperature control system, including the RF generator, Phase/Magnitude Sensor, Cap Motor driver, turbo pump (TMP), Pendulum (Throttle) valve, Hoist, Electrostatic Chuck (ESC), heater, and coolant path. SYSTEM INTERCONNECT: 224-800096-830 SUPPLY CIRCUIT VOLTAGE RATING: 208VAC +10%, -10% FREQUENCY: 50/60 Hz SUPPLY CIRCUIT RATING: 3 Ph, 3 WIRE + PROTECTIVE GND PM FULL-LOAD CURRENT: 25.8 AMP RF FULL-LOAD CURRENT: 68.00 AMP RATING OF LARGEST LOAD: 38 AMP MAIN CB CURRENT RATING: 80 AMP RF CB RATING: 80 AMP RF generator type: AE Navigator IIOEM 型号描述
REACTIVE ION ETCH (RIE) Conductor etch helps shape the electrically “active” materials of a semiconductor device. Even a slight variation in these miniature structures can degrade device performance. In fact, these structures are so tiny and sensitive that etch processes push the boundaries of the basic laws of physics and chemistry. Lam’s Kiyo® product family delivers the high-performance capabilities needed to precisely and consistently form these features precisely and with high productivity. For some applications, select models are also available through our Reliant® Systems as refurbished products, providing lower cost of ownership with the same quality assurance and performance as new systems.文件
无文件
类别
Dry / Plasma Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
148401
晶圆尺寸：
12"/300mm
年份：
2024
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH CORPORATION
2300 KIYO GX
类别
Dry / Plasma Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
148401
晶圆尺寸：
12"/300mm
年份：
2024
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Poly Etcher配置
RF system, pressure control system and temperature control system, including the RF generator, Phase/Magnitude Sensor, Cap Motor driver, turbo pump (TMP), Pendulum (Throttle) valve, Hoist, Electrostatic Chuck (ESC), heater, and coolant path. SYSTEM INTERCONNECT: 224-800096-830 SUPPLY CIRCUIT VOLTAGE RATING: 208VAC +10%, -10% FREQUENCY: 50/60 Hz SUPPLY CIRCUIT RATING: 3 Ph, 3 WIRE + PROTECTIVE GND PM FULL-LOAD CURRENT: 25.8 AMP RF FULL-LOAD CURRENT: 68.00 AMP RATING OF LARGEST LOAD: 38 AMP MAIN CB CURRENT RATING: 80 AMP RF CB RATING: 80 AMP RF generator type: AE Navigator IIOEM 型号描述
REACTIVE ION ETCH (RIE) Conductor etch helps shape the electrically “active” materials of a semiconductor device. Even a slight variation in these miniature structures can degrade device performance. In fact, these structures are so tiny and sensitive that etch processes push the boundaries of the basic laws of physics and chemistry. Lam’s Kiyo® product family delivers the high-performance capabilities needed to precisely and consistently form these features precisely and with high productivity. For some applications, select models are also available through our Reliant® Systems as refurbished products, providing lower cost of ownership with the same quality assurance and performance as new systems.文件
无文件