说明
Polysilicon Etch配置
无配置OEM 型号描述
Lam’s TCP 9400DFM is an advanced silicon etch system for 200mm wafers, designed to meet gate and STI etch requirements down to the 130nm technology node. It is capable of running multiple applications in situ, increasing process flexibility, reliability, and productivity. The system features SymFlo™, a symmetrical flow gas distribution system, and Voltage Control Interface™ (VCI™), a closed-loop system that enhances chamber matching capabilities. It also incorporates Lam’s unique Waferless Auto Clean™ (WAC™) technology, which offers world-class mean time between cleans (MTBC). An optional interferometric endpoint system provides repeatable endpoint capability. The TCP 9400DFM offers upgrade capability for Lam’s highly successful TCP 9400PTX.文件
无文件
类别
Dry / Plasma Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
122874
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH CORPORATION
TCP 9400DFM
类别
Dry / Plasma Etch
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
122874
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Polysilicon Etch配置
无配置OEM 型号描述
Lam’s TCP 9400DFM is an advanced silicon etch system for 200mm wafers, designed to meet gate and STI etch requirements down to the 130nm technology node. It is capable of running multiple applications in situ, increasing process flexibility, reliability, and productivity. The system features SymFlo™, a symmetrical flow gas distribution system, and Voltage Control Interface™ (VCI™), a closed-loop system that enhances chamber matching capabilities. It also incorporates Lam’s unique Waferless Auto Clean™ (WAC™) technology, which offers world-class mean time between cleans (MTBC). An optional interferometric endpoint system provides repeatable endpoint capability. The TCP 9400DFM offers upgrade capability for Lam’s highly successful TCP 9400PTX.文件
无文件