说明

Details Attached

配置

Envision software Configured for 200mm / 8” wafers Hine Cassette indexer load / unload Entrance Loadlock Main chamber - Top actuated clamping system - Configured for ? gases Remote AC Panel

OEM 型号描述

The Rainbow 4520 is a state-of-the-art Silicon Dioxide Etching system that is fully automated and capable of processing wafers of various sizes, including 4-, 5-, 6-, and 8-inch wafers. This advanced system features a top powered electrode plate, programmable electrode spacing, and automatic wafer alignment and placement, ensuring precise and efficient etching. With its advanced capabilities, the Rainbow 4520 is an ideal solution for high-quality Silicon Dioxide Etching.