说明
LAM Rainbow 4528XL Dimensions & weight estimates: Mainframe dim (cm): 111.8 x 137.2 x 167.5 Mainframe weight (kg): 788 Bypack1 dim (cm): 55.9 x 81.3 x 110.5 Bypack1 weight (kg): 135 Bypack2 dim (cm): 55.9 x 22.9 x 76.2 Bypack2 weight (kg): 120 Bypack3 dim (cm): 47.5 x 93 x 126 Bypack3 weight (kg): 226.8 mainframe equipment tool配置
LAM Rainbow 4528XL - Plasma Etch Process: Oxide Etch Wafer size: 200 mm Wafer type: Notch Valve type: VAT65 ESC: Yes Bulkhead: Monochromator Endpoint: Yes Software: Envision 1.6.1-005 RF: Paramount Plus VHF3027 Paramount Plus MF5002 Cart: RF cart Iso module: No AC box: -002 (breakers) Gas and process configuration for - Chamber (1) Ar: 500 sccm CF4: 97 sccm CHF3: 104 sccm C4F8: 20 sccm sccm O2 LOW: 20.0 sccm O2 HIGH: 1000.0 sccm N2: 100 sccm Robot type: Harmonic Drive Loader type: Hine indexers 38A Loadlock: Entrance and Exit LL Turbo pumps: HGP pump Controllers: HGP pump controller VAT 65 controller Gas box: AC Rack: Yes (Local power box) in basementOEM 型号描述
The Rainbow 4520XL is part of Lam Research’s Rainbow series of etch systems. This series addresses processes for wafers up to 200mm and feature sizes as small as 0.35 micron. The Rainbow product line includes the 4400, 4500, 4600, and 4700 series for etching polysilicon, oxide, aluminum, and tungsten films. These systems offer improved etch capability, reliability, and performance through unique features such as a patented wafer handling system and a proprietary source for generating stable plasma.文件
无文件
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
132398
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
RAINBOW 4520XL
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
132398
晶圆尺寸：
8"/200mm
年份：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
LAM Rainbow 4528XL Dimensions & weight estimates: Mainframe dim (cm): 111.8 x 137.2 x 167.5 Mainframe weight (kg): 788 Bypack1 dim (cm): 55.9 x 81.3 x 110.5 Bypack1 weight (kg): 135 Bypack2 dim (cm): 55.9 x 22.9 x 76.2 Bypack2 weight (kg): 120 Bypack3 dim (cm): 47.5 x 93 x 126 Bypack3 weight (kg): 226.8 mainframe equipment tool配置
LAM Rainbow 4528XL - Plasma Etch Process: Oxide Etch Wafer size: 200 mm Wafer type: Notch Valve type: VAT65 ESC: Yes Bulkhead: Monochromator Endpoint: Yes Software: Envision 1.6.1-005 RF: Paramount Plus VHF3027 Paramount Plus MF5002 Cart: RF cart Iso module: No AC box: -002 (breakers) Gas and process configuration for - Chamber (1) Ar: 500 sccm CF4: 97 sccm CHF3: 104 sccm C4F8: 20 sccm sccm O2 LOW: 20.0 sccm O2 HIGH: 1000.0 sccm N2: 100 sccm Robot type: Harmonic Drive Loader type: Hine indexers 38A Loadlock: Entrance and Exit LL Turbo pumps: HGP pump Controllers: HGP pump controller VAT 65 controller Gas box: AC Rack: Yes (Local power box) in basementOEM 型号描述
The Rainbow 4520XL is part of Lam Research’s Rainbow series of etch systems. This series addresses processes for wafers up to 200mm and feature sizes as small as 0.35 micron. The Rainbow product line includes the 4400, 4500, 4600, and 4700 series for etching polysilicon, oxide, aluminum, and tungsten films. These systems offer improved etch capability, reliability, and performance through unique features such as a patented wafer handling system and a proprietary source for generating stable plasma.文件
无文件