说明
LAM RESEARCH 9600 TCP METAL ETCH配置
MOUNTING: BULKHEAD MOUNT SOFTWARE: ENVISION 1.52 INDEXERS: HINE CLAMPING: ESC BACKSIDE HELIUM: CLOSED LOOP GENERATOR: 3 RFG 1250 RF MATCH: UPPER TCP, LOWER MINI MATCH, DSQ MATCH TURBO: ALCATEL/ADIXEN 1300L TURBO CONTROLLER: ALCATEL 1300 VAT GATE: VAT 65 VAT CONTROLLER: PM-7 ENDPOINT: DUAL ENDPOINT 703 nm AND 520nm DSQ: HINGED WVDS: AUTO FILL APM: STANDARD MFCS: Horiba STEC SEC-7440 GAS CONFIG: GAS 1: CL2 200 GAS 2: BCL3 100 GAS 3: SF6 100 GAS 4: N2 50 GAS 5: N2 1000 GAS 6: AR 100 GAS 7: O2 1000 GAS 8: CF4 200 GAS 9: H2O 500OEM 型号描述
TCP 9600 is a high-density, low-pressure system from Lam’s TCP product line. It was introduced in late 1992 and incorporates the Company’s patented Transformer Coupled Plasma-TM- source technology for etching 0.35 micron and smaller geometries. The TCP 9600 series is designed for metal etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode. This improves etch results across a wider process window and offers customers a reliable, lower cost of ownership solution to their advanced needs.文件
无文件
类别
Dry / Plasma Etch
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
138113
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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LAM RESEARCH CORPORATION
TCP 9600
类别
Dry / Plasma Etch
上次验证： 昨天
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
138113
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
LAM RESEARCH 9600 TCP METAL ETCH配置
MOUNTING: BULKHEAD MOUNT SOFTWARE: ENVISION 1.52 INDEXERS: HINE CLAMPING: ESC BACKSIDE HELIUM: CLOSED LOOP GENERATOR: 3 RFG 1250 RF MATCH: UPPER TCP, LOWER MINI MATCH, DSQ MATCH TURBO: ALCATEL/ADIXEN 1300L TURBO CONTROLLER: ALCATEL 1300 VAT GATE: VAT 65 VAT CONTROLLER: PM-7 ENDPOINT: DUAL ENDPOINT 703 nm AND 520nm DSQ: HINGED WVDS: AUTO FILL APM: STANDARD MFCS: Horiba STEC SEC-7440 GAS CONFIG: GAS 1: CL2 200 GAS 2: BCL3 100 GAS 3: SF6 100 GAS 4: N2 50 GAS 5: N2 1000 GAS 6: AR 100 GAS 7: O2 1000 GAS 8: CF4 200 GAS 9: H2O 500OEM 型号描述
TCP 9600 is a high-density, low-pressure system from Lam’s TCP product line. It was introduced in late 1992 and incorporates the Company’s patented Transformer Coupled Plasma-TM- source technology for etching 0.35 micron and smaller geometries. The TCP 9600 series is designed for metal etch applications and is used to produce a broad range of advanced logic and memory devices. The system operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates, with independent power control to the lower electrode. This improves etch results across a wider process window and offers customers a reliable, lower cost of ownership solution to their advanced needs.文件
无文件