说明
ETCH配置
Poly ETCH (EFEM Missing)OEM 型号描述
Built on the paradigmE product architecture, paradigmE Si incorporates enhancements to enable customers to run the chemistries required for poly-silicon applications. The system features Mattson Technology's proprietary Faraday shield designed to improve etch process control and enhance mean-time-between-clean (MTBC) performance by up to three times over competitive systems. The paradigmE Si also enables true independent control of ion density and energy, providing improved profile control and minimized sputtering to reduce maintenance costs for the lowest cost-of-ownership.文件
无文件
MATTSON
paradigmE SI
已验证
类别
Dry / Plasma Etch
上次验证： 16 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
75625
晶圆尺寸：
12"/300mm
年份：
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
MATTSON
paradigmE SI
类别
Dry / Plasma Etch
上次验证： 16 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
75625
晶圆尺寸：
12"/300mm
年份：
2011
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
ETCH配置
Poly ETCH (EFEM Missing)OEM 型号描述
Built on the paradigmE product architecture, paradigmE Si incorporates enhancements to enable customers to run the chemistries required for poly-silicon applications. The system features Mattson Technology's proprietary Faraday shield designed to improve etch process control and enhance mean-time-between-clean (MTBC) performance by up to three times over competitive systems. The paradigmE Si also enables true independent control of ion density and energy, providing improved profile control and minimized sputtering to reduce maintenance costs for the lowest cost-of-ownership.文件
无文件