说明
Neither matching unit is in working condition The backing pump has failed There is an internal leak in the system, which is believed to be related to the slit valve配置
ICP/RIE Configured to run SF6, Hydrogen and Methane (ITO etch) Frequency: 50/60 hz Voltage: 208 VAC 3 Phase Full Load AMP: 40 AMP'sOEM 型号描述
Etching System文件
无文件
OXFORD
100 180 ICP
已验证
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Idle
产品编号：
109932
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
100 180 ICP
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
Installed / Idle
产品编号：
109932
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Neither matching unit is in working condition The backing pump has failed There is an internal leak in the system, which is believed to be related to the slit valve配置
ICP/RIE Configured to run SF6, Hydrogen and Methane (ITO etch) Frequency: 50/60 hz Voltage: 208 VAC 3 Phase Full Load AMP: 40 AMP'sOEM 型号描述
Etching System文件
无文件