说明
Gases: 8 lines with 8 MFCs. 2 of NH3 (100 SCCM) and 6 of N2 (4 of 1 SLM and 1 of 200 SCCM and 1 of 2SLM) Plasma Therm 700 Series Wafer Batch Plasma Etcher and PECVD The items (ID SS5576-1-2-1-1-1) below are available now. Please contact us for the availability. They are only for end users and are subject to prior sale. Plasma-Therm Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz Plasma-Therm 790 PECVD upper Electrode Low Freq. & Lower electrode High Freq. Plasma-Therm 790 RIE Parts tool Plasma-Therm 790 PECVD Plasma-Therm 790 PECVD Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm VLR VersaWorks Cluster tool- one chamber PECVD Plasma-Therm VLN (Versaline) ICP – single wafer manual load Plasma-Therm VLN (Versaline) ICP – two wafer Brooks handler – manual load YESHMDS Class 10 – all Stainless Steel配置
无配置OEM 型号描述
未提供文件
无文件
类别
Dry / Plasma Etch
上次验证： 7 天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
138624
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PLASMATHERM
700
类别
Dry / Plasma Etch
上次验证： 7 天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
138624
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Gases: 8 lines with 8 MFCs. 2 of NH3 (100 SCCM) and 6 of N2 (4 of 1 SLM and 1 of 200 SCCM and 1 of 2SLM) Plasma Therm 700 Series Wafer Batch Plasma Etcher and PECVD The items (ID SS5576-1-2-1-1-1) below are available now. Please contact us for the availability. They are only for end users and are subject to prior sale. Plasma-Therm Dual Chamber 790 PECVD (on side Low Freq. & other side 13.56Mhz) could be converted to both sides 13.56MHz Plasma-Therm 790 PECVD upper Electrode Low Freq. & Lower electrode High Freq. Plasma-Therm 790 RIE Parts tool Plasma-Therm 790 PECVD Plasma-Therm 790 PECVD Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm SLR 720 RIE Plasma-Therm VLR VersaWorks Cluster tool- one chamber PECVD Plasma-Therm VLN (Versaline) ICP – single wafer manual load Plasma-Therm VLN (Versaline) ICP – two wafer Brooks handler – manual load YESHMDS Class 10 – all Stainless Steel配置
无配置OEM 型号描述
未提供文件
无文件