说明
无说明配置
ICP system complete with: -robotic wafer transfer system -computer controls -thermal transfer module for substrate clamping -closed loop pressure control -RF high freq. inductive coupled plasma source for high density plasma creation -Installed pumps and MFC control unitsOEM 型号描述
未提供文件
无文件
PLASMATHERM
SLR 770
已验证
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
14081
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PLASMATHERM
SLR 770
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
14081
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
ICP system complete with: -robotic wafer transfer system -computer controls -thermal transfer module for substrate clamping -closed loop pressure control -RF high freq. inductive coupled plasma source for high density plasma creation -Installed pumps and MFC control unitsOEM 型号描述
未提供文件
无文件