
说明
无说明配置
The tool is missing the turbo & controller, but rebuilt spares can be included with tool Gases: CL2, BCL3, CF4, C2F6, Ar, O2 6” but possible to run 8” (no load-lock)OEM 型号描述
Plasma etch文件
无文件
类别
Dry / Plasma Etch
上次验证: 6 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
140328
晶圆尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PLASMATHERM
SLR 740
类别
Dry / Plasma Etch
上次验证: 6 天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
140328
晶圆尺寸:
6"/150mm
年份:
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
The tool is missing the turbo & controller, but rebuilt spares can be included with tool Gases: CL2, BCL3, CF4, C2F6, Ar, O2 6” but possible to run 8” (no load-lock)OEM 型号描述
Plasma etch文件
无文件