说明
无说明配置
ICP Etcher See attached utility one-line for gases. The tool is missing the turbo & controller, but rebuilt spares can be included with the tool. Both chambers are RIE 6” only (load-lock)OEM 型号描述
Etchers & Ashers文件
无文件
类别
Dry / Plasma Etch
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
140327
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PLASMATHERM
SLR-770 ICP
类别
Dry / Plasma Etch
上次验证： 5 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
140327
晶圆尺寸：
6"/150mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
ICP Etcher See attached utility one-line for gases. The tool is missing the turbo & controller, but rebuilt spares can be included with the tool. Both chambers are RIE 6” only (load-lock)OEM 型号描述
Etchers & Ashers文件
无文件