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PLASMATHERM VERSALINE ETCH

说明

ICP Etch - 3 Chamber - All same process

配置

System Configuration Transfer Module 150MM Dual Vacuum Loadlock Brooks Mag 7 Robot Ebara Dry Pump Process Modules ICP Gases BCL3 - 50sccm - Brooks GF125 CL2 - 50sccm - Brooks GF125 O2 - 100sccm - Brooks GF125 Ar - 100sccm - Brooks GF125 SF6 - 50sccm - Brooks GF125 N2 - 100sccm - Brooks GF125 HE - 100sccm - Brooks GF125 Turbo Pump - Edwards STP-A 1303CV Chiller - SMC Thermo Dry Pump - Ebara SR20N RF Gen #1 - ENI GWM-24A RF Gen #2 - MKS Elite

OEM 型号描述

未提供

文件

文件图标

Plasmatherm Versaline ICP.pdf

PLASMATHERM

VERSALINE ETCH

verified-listing-icon

已验证

类别

Dry / Plasma Etch

上次验证： 22 天前

物品主要详细信息

状况：

Used

运行状况:

未知

产品编号：

138075

晶圆尺寸：

6"/150mm

年份：

2016

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

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PLASMATHERM

VERSALINE ETCH

verified-listing-icon

已验证

类别

Dry / Plasma Etch

上次验证： 22 天前

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物品主要详细信息

状况：

Used

运行状况:

未知

产品编号：

138075

晶圆尺寸：

6"/150mm

年份：

2016

Logistics Support

Available

Transaction Insured by Moov

Available

Refurbishment Services

Available

说明

ICP Etch - 3 Chamber - All same process

配置

System Configuration Transfer Module 150MM Dual Vacuum Loadlock Brooks Mag 7 Robot Ebara Dry Pump Process Modules ICP Gases BCL3 - 50sccm - Brooks GF125 CL2 - 50sccm - Brooks GF125 O2 - 100sccm - Brooks GF125 Ar - 100sccm - Brooks GF125 SF6 - 50sccm - Brooks GF125 N2 - 100sccm - Brooks GF125 HE - 100sccm - Brooks GF125 Turbo Pump - Edwards STP-A 1303CV Chiller - SMC Thermo Dry Pump - Ebara SR20N RF Gen #1 - ENI GWM-24A RF Gen #2 - MKS Elite

OEM 型号描述

未提供

文件

文件图标

Plasmatherm Versaline ICP.pdf

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