说明
无说明配置
Parameter DSE IV Specification Si Etch Rate (µm/min) ≥7.5 Etch Depth 350 µm CD size 1020 x 1020 µm Aspect ratio 1:3 Si exposed area ~70% Si: PR Selectivity >100:1 Si: Si02 Selectivity >150:1 Sidewall profile 90 ± 20 Sidewall roughness (µm) <2 Within wafer Non-uniformity @ 6" <±5% excluding edge exclusion 6mmOEM 型号描述
"The PLASMA-THERM VERSALINE ICP is an Inductive Couple Plasma (ICP) etch platform that has been developed over decades of technological evolution at Plasma-Therm®. It offers high flexibility for application-optimized processes, with a large library of processes for a variety of applications, including wireless, photonics, power devices, compound semiconductors, memory, quantum, and advanced packaging. The platform can handle a wide range of materials, including II-VIs and III-Vs, silicon-based materials, dielectrics, polymers, metals, metal oxides and nitrides, and piezoelectrics. It also supports corrosive chemistry with corrosion-resistant components. The hardware of the VERSALINE ICP is flexible and configurable, with options for handling cassette cluster systems or single-substrate loadlocks. It features a 2MHz ICP source that is heated for process stability and decreased first wafer effects, as well as increased MTBC. The substrate bias can be 13.56MHz or an optional 40MHz, and the substrate temperature can be controlled with backside helium using mechanical or electrostatic clamping. The platform also offers application-specific substrate electrode temperature ranges. The VERSALINE ICP is controlled by the Cortex control system and supports the EndpointWorks program for laser, optical emission, and other system parameter-based endpoints."文件
PLASMATHERM
VERSALINE ICP
已验证
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
New
运行状况:
Deinstalled / Crated
产品编号：
109525
晶圆尺寸：
6"/150mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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PLASMATHERM
VERSALINE ICP
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
New
运行状况:
Deinstalled / Crated
产品编号：
109525
晶圆尺寸：
6"/150mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available