说明
Details Attached Plasma Etcher Rapier APS ICP PRS Chm Excluded: ESA70W Pump (QTY 1) ESR20N Pumps (QTY 1) Helium MFM for ICP Module Missing (QTY 1)配置
Software Version - 12.5.1 Process - Si/Ox/ Nit Etch Chamber System: - Rapier Module - APS Module - PRS Module - ICP Module Handler System - VCE (QTY 2) RF & Power Rack (QTY 2) VSPOEM 型号描述
Omega fxP is a cluster system supporting up to 6 plasma etch (ICP, DRIE, and/or Synapse) chambers. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.文件
类别
Dry / Plasma Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154392
晶圆尺寸：
8"/200mm
年份：
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA / SPTS
OMEGA fxP
类别
Dry / Plasma Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154392
晶圆尺寸：
8"/200mm
年份：
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available