说明
EOP, warm idle配置
Synapse chamber for Omega fxP Etch system w/o MF Gas table:: SF6 H2 CHF3 CF4 and C4F8 He O2OEM 型号描述
Omega fxP is a cluster system supporting up to 6 plasma etch (ICP, DRIE, and/or Synapse) chambers. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.文件
无文件
类别
Dry / Plasma Etch
上次验证： 11 天前
物品主要详细信息
状况：
Parts Tool
运行状况:
未知
产品编号：
147437
晶圆尺寸：
6"/150mm
年份：
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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KLA / SPTS
OMEGA fxP
类别
Dry / Plasma Etch
上次验证： 11 天前
物品主要详细信息
状况：
Parts Tool
运行状况:
未知
产品编号：
147437
晶圆尺寸：
6"/150mm
年份：
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
EOP, warm idle配置
Synapse chamber for Omega fxP Etch system w/o MF Gas table:: SF6 H2 CHF3 CF4 and C4F8 He O2OEM 型号描述
Omega fxP is a cluster system supporting up to 6 plasma etch (ICP, DRIE, and/or Synapse) chambers. The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.文件
无文件