说明
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.配置
Vacuum Pump and Chiller IncludedOEM 型号描述
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.文件
无文件
类别
Dry / Plasma Etch
上次验证： 25 天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled / Crated
产品编号：
123899
晶圆尺寸：
8"/200mm
Chiller:
HCE-002
Pumps:
Kashiyama
HDD / Software:
No
年份：
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
XACTIX CVE
类别
Dry / Plasma Etch
上次验证： 25 天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled / Crated
产品编号：
123899
晶圆尺寸：
8"/200mm
Chiller:
HCE-002
Pumps:
Kashiyama
HDD / Software:
No
年份：
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.配置
Vacuum Pump and Chiller IncludedOEM 型号描述
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.文件
无文件