
说明
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.配置
Vacuum Pump and Chiller IncludedOEM 型号描述
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.文件
无文件
PREFERRED
SELLER
类别
Dry / Plasma Etch
上次验证: 29 天前
Buyer pays 12% premium of final sale price
物品主要详细信息
状况:
Used
运行状况:
Deinstalled / Crated
产品编号:
123899
晶圆尺寸:
8"/200mm
Chiller:
HCE-002
Pumps:
Kashiyama
HDD / Software:
No
年份:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
PREFERRED
SELLER
KLA / SPTS
XACTIX CVE
类别
Dry / Plasma Etch
上次验证: 29 天前
Buyer pays 12% premium of final sale price
物品主要详细信息
状况:
Used
运行状况:
Deinstalled / Crated
产品编号:
123899
晶圆尺寸:
8"/200mm
Chiller:
HCE-002
Pumps:
Kashiyama
HDD / Software:
No
年份:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
The CVE module is compatible with SPTS' cluster platforms. The chamber design provides high etch rates, uniformity and efficiency.配置
Vacuum Pump and Chiller IncludedOEM 型号描述
The CVE module is compatible with SPTS' cluster platforms, and has a unique chamber design which provides high etch rates, uniformity and efficiency. It is designed allow high volume production and the integration of XeF2 modules with the other process modules available from SPTS.文件
无文件