说明
Vapor hydrogen fluoride (VHF) etch system De-installed, in working condition when taken offline配置
SPTS PRIMAXX MONARCH 25 Omega c2L Platform (up to 4 process modules) Local scrubber Wet Type CQ800 VHF Scrubber NaOH Automatic alkali supply storage tank systemOEM 型号描述
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume production文件
无文件
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
116047
晶圆尺寸：
未知
年份：
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA / SPTS
PRIMAXX MONARCH 25
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
116047
晶圆尺寸：
未知
年份：
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Vapor hydrogen fluoride (VHF) etch system De-installed, in working condition when taken offline配置
SPTS PRIMAXX MONARCH 25 Omega c2L Platform (up to 4 process modules) Local scrubber Wet Type CQ800 VHF Scrubber NaOH Automatic alkali supply storage tank systemOEM 型号描述
The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the Primaxx® fxP or Primaxx® c2L configurations. High throughput, high uptime 25-wafer batch processing Process chamber, gas/liquid panel, and pressure/vacuum components, all within a small footprint Extensive process control and monitoring functions ensure the yield, reliability and repeatability required in volume production文件
无文件