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说明
Reactive Ion Etcher. Good Condition. -Deinstalled, warehoused. -In working condition -Manual loading -includes PC control system -includes manuals -includes Leybold mechanical pump -includes Leybold turbo pump -Leybold turbo pump controller type: Turbotronix NT 151 / 361配置
-Cathode diameter: 30 cm -Cathode area: 706.5 cm2 -RF forward power range: 10 to 600 watts -Chamber max pressure: 500 mtorr -Substrate sizes: 2 to 8 inch and small fragments -Number of gas lines available: 8OEM 型号描述
未提供文件
无文件
STS
320 PC
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
28956
晶圆尺寸：
8"/200mm
年份：
1995
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说明
Reactive Ion Etcher. Good Condition. -Deinstalled, warehoused. -In working condition -Manual loading -includes PC control system -includes manuals -includes Leybold mechanical pump -includes Leybold turbo pump -Leybold turbo pump controller type: Turbotronix NT 151 / 361配置
-Cathode diameter: 30 cm -Cathode area: 706.5 cm2 -RF forward power range: 10 to 600 watts -Chamber max pressure: 500 mtorr -Substrate sizes: 2 to 8 inch and small fragments -Number of gas lines available: 8OEM 型号描述
未提供文件
无文件