说明
It’s a legendary tool for Deep Si Etch from STS/SPTS Best tool for Deep Si etch in MEMS , Advance Package , TSV in compare with Rapier/SPTS , LAM & AMEC by far. SOI kit option included.配置
Wafer Size: 200mm Chamber Quantity: 2 Chambers Volts / Hz/Ph: 380 Volts/60Hz ,160 Amps/phaseOEM 型号描述
未提供文件
STS
CPX Pegasus
已验证
类别
Dry / Plasma Etch
上次验证: 60 多天前
物品主要详细信息
状况:
Refurbished
运行状况:
未知
产品编号:
109365
晶圆尺寸:
8"/200mm
年份:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
STS
CPX Pegasus
类别
Dry / Plasma Etch
上次验证: 60 多天前
物品主要详细信息
状况:
Refurbished
运行状况:
未知
产品编号:
109365
晶圆尺寸:
8"/200mm
年份:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available