说明
Size Configuration: 6”, 150mm Direct-Cooled Chamber 3/8” Pressure w/ATM Sensor & 3/8” Gas Manifolds MKS 627A Heated Baratron Dacscan P/N: 80-095-278, ISS 8 or Higher Software Ver. 4.02g 20 Recipe P/N: 26-041-038, Rev. C or higher RF Generator: ENI ACG-10 (Re-Calibrated)- 4- Unit 8100 MFC’s- 1- Unit 8130 Pressure Controller- 1- Integrated Flat panel配置
Gases in use: SF6, FR23, FR116, He, O2OEM 型号描述
未提供文件
无文件
TEGAL
903
已验证
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
58088
晶圆尺寸：
6"/150mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEGAL
903
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
58088
晶圆尺寸：
6"/150mm
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Size Configuration: 6”, 150mm Direct-Cooled Chamber 3/8” Pressure w/ATM Sensor & 3/8” Gas Manifolds MKS 627A Heated Baratron Dacscan P/N: 80-095-278, ISS 8 or Higher Software Ver. 4.02g 20 Recipe P/N: 26-041-038, Rev. C or higher RF Generator: ENI ACG-10 (Re-Calibrated)- 4- Unit 8100 MFC’s- 1- Unit 8130 Pressure Controller- 1- Integrated Flat panel配置
Gases in use: SF6, FR23, FR116, He, O2OEM 型号描述
未提供文件
无文件