说明
Nitride Plasma Reactive Ion Etch配置
1.Mainframe. Configured for dual loading of 6 inch cassettes. Singel nitride fitted process chamber MFC Configuration:- STEC 4400MC N2 200 sccm STEC 4400MC O2 100 sccm STEC 4400MC SF6 200 sccm STEC 4400MC He 1 slm STEC 4400MC CF4 200 sccm STEC 4400MC CHF3 200 sccm TYLAN PV104C He 20 slm Daihen Dauma 10SA with Daihen UIM-1-T1 display unit TYLAN PC73 HeLIUM BACK PRESSURE MONITOR 2.Electronics rack 3.Turbo pump. Seiko Seki MG-STPH600C-T52A 4.Pump controller rack with Seiko Seki MG-STPH600C-T54 turbo pump controller, 208V 3 Phase 12 KVA 190kg total power consumption. 6.Chamber backing pump Edwards CDP80 with Edwards gate valve model GVI 100M 7.Power supply Transformer, I/P 208VAC 3 PH O/P 200VAC 5A dimensions 31cm x 41cm x 42 cm (Height). 8. Chiller SMC Model INR-341-61A Triple Chiller Voltage= 200 3 phase 50/60 Hz 25A 350 kg dimensions 72 cm x 92 cm x 175 cm (height). -Deinstalled, warehoused. -In working conditionOEM 型号描述
未提供文件
无文件
TEL / TOKYO ELECTRON
TE 5480
已验证
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
28958
晶圆尺寸：
6"/150mm
年份：
1992
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / TOKYO ELECTRON
TE 5480
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
28958
晶圆尺寸：
6"/150mm
年份：
1992
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Nitride Plasma Reactive Ion Etch配置
1.Mainframe. Configured for dual loading of 6 inch cassettes. Singel nitride fitted process chamber MFC Configuration:- STEC 4400MC N2 200 sccm STEC 4400MC O2 100 sccm STEC 4400MC SF6 200 sccm STEC 4400MC He 1 slm STEC 4400MC CF4 200 sccm STEC 4400MC CHF3 200 sccm TYLAN PV104C He 20 slm Daihen Dauma 10SA with Daihen UIM-1-T1 display unit TYLAN PC73 HeLIUM BACK PRESSURE MONITOR 2.Electronics rack 3.Turbo pump. Seiko Seki MG-STPH600C-T52A 4.Pump controller rack with Seiko Seki MG-STPH600C-T54 turbo pump controller, 208V 3 Phase 12 KVA 190kg total power consumption. 6.Chamber backing pump Edwards CDP80 with Edwards gate valve model GVI 100M 7.Power supply Transformer, I/P 208VAC 3 PH O/P 200VAC 5A dimensions 31cm x 41cm x 42 cm (Height). 8. Chiller SMC Model INR-341-61A Triple Chiller Voltage= 200 3 phase 50/60 Hz 25A 350 kg dimensions 72 cm x 92 cm x 175 cm (height). -Deinstalled, warehoused. -In working conditionOEM 型号描述
未提供文件
无文件