说明
SCCM Details Attached配置
LoadLock Door - Open & Close Cylinder: AGV Wafer Type - Notch/Flat Zone: Flat E-Chuck Type - Polymide/Ceramic: Ceramic ESC 8" Caassette - Cassette (inch & Condition) 8" Monitor - Operation Monitor State: Side Position Laser Sensor/ Mapping - Visual: OK Pen - Touch screen pen: Ok Touch Screen - Touch Film: OK Signal Tower: - Maker/Model: PATLITE/SLF-V - Visual R/Y/G/B: R/Y/G/B Door Safty Sensor - Visual: 2System Robot: Maker: Yaskawa Ass'y Type - VS2A / VS2B: VS2A ASSY TRANSFER ARM FOrm: Ceramic Fork Rubber Pin: Good Surface State: Good Gate Valve: C/C 1 Angle V/V: OK C/C 2 Angle V/V: OK T/C Angle V/V (T1,T2): OK P/A: Maker: Yaskawa Ass'y Type : VOSH V0SH Visual: Good Wafer Sensor - Visual: Ok V/G(Baratron)_T/C - Maker/Model/Range: MKS/1torr/622A1TDE V/G(CV)_C/C,T/C - Granville Phillips/275203-KF16_3ea: OK Vacuum Switch_C/C - Maker/Model: Valcom / NDRN T/C Control Board: Slot 1 : TYB121-1/COM Slot 2 : TYB112-A/DIO - OK Slot 3 : TYB112-B/DIO - OK Slot 4 : OK Slot 5 : TYB111-C/MAIO - OK Slot 6 : TYB134-1/ILK - OK Robot Controller: RC/ELC1 - SRC-ll 013 PAC/ELC2 - SRC-ll 004 Ballast N2: PCV Unit - STEC/SV-1000OEM 型号描述
The Unity II is a platform introduced by TEL in 1995. It has gained a solid reputation for being one of the most reliable platforms available, with over 800 systems delivered to customers worldwide. In 1998, the Unity was recognized as the World Leader in Etch System Performance in the prestigious VLSI Customer Satisfaction Survey. The Unity II is a 2 chamber tool, focused on 200mm wafers, and various configurations are offered for wafer sizes from 150 to 300mm. It is a testament to its reliability and performance.文件
类别
Dry / Plasma Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
153984
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
UNITY II
类别
Dry / Plasma Etch
上次验证： 2 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
153984
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available