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TEL / TOKYO ELECTRON UNITY ME
  • TEL / TOKYO ELECTRON UNITY ME
  • TEL / TOKYO ELECTRON UNITY ME
  • TEL / TOKYO ELECTRON UNITY ME
说明
Oxide
配置
Oxide
OEM 型号描述
UNITY™ Me is a cost effective dry etch system for 100/150/200mm wafer diameter, which has been attracting attention in recent years again as a highly efficient system and is still sold as a new product. There are rich variety of special chamber specifications, such as SCCM™, DRM for SiO2/SiN etch and UD chamber for Si/SiC trench etch. TEL offers a wide range of etch applications to the customer through closely collaboration in process demonstration using internal evaluation tools. Unity ME was originally made in Mass. But moved to Japan, supported 3 chambers and an ash or other small unit. Originally 200mm, some were converted to 300mm. TEL now manufactures this system again for 100-300mm.
文件

无文件

类别
Dry / Plasma Etch

上次验证: 60 多天前

物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

56168


晶圆尺寸:

8"/200mm


年份:

2004


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

TEL / TOKYO ELECTRON

UNITY ME

verified-listing-icon
已验证
类别
Dry / Plasma Etch
上次验证: 60 多天前
listing-photo-319ba7a3d9d647b0ba068f6adb5d5eac-https://d2pkkbyngq3xpw.cloudfront.net/moov_media/3.0-assets/photo-coming-soon-small.png
物品主要详细信息

状况:

Used


运行状况:

未知


产品编号:

56168


晶圆尺寸:

8"/200mm


年份:

2004


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Oxide
配置
Oxide
OEM 型号描述
UNITY™ Me is a cost effective dry etch system for 100/150/200mm wafer diameter, which has been attracting attention in recent years again as a highly efficient system and is still sold as a new product. There are rich variety of special chamber specifications, such as SCCM™, DRM for SiO2/SiN etch and UD chamber for Si/SiC trench etch. TEL offers a wide range of etch applications to the customer through closely collaboration in process demonstration using internal evaluation tools. Unity ME was originally made in Mass. But moved to Japan, supported 3 chambers and an ash or other small unit. Originally 200mm, some were converted to 300mm. TEL now manufactures this system again for 100-300mm.
文件

无文件