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说明
Dual-Source design The cavity is designed with microwave on the upper layer and radio frequency on the lower layer.配置
无配置OEM 型号描述
未提供文件
无文件
TRYMAX
NEO 3000
类别
Dry / Plasma Etch
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
78805
晶圆尺寸：
8"/200mm, 12"/300mm
年份：
2013
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Refurbishment Services
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说明
Dual-Source design The cavity is designed with microwave on the upper layer and radio frequency on the lower layer.配置
无配置OEM 型号描述
未提供文件
无文件