说明
Logic 130nm Flash- Low Acid Viaform Chemistry Angled Entry Integrated Anneal Closed Loop bath control 60wph配置
1 Novellus/Sabre-XT 2 Wafer Size: 200mm 3 Integrated frame with at least two (2) Plating Modules and Phase 3 Anode Chamber 4 200mm Clamshell Drive Unit 5 196mm Clamshell Cup and Cone (Phase 1A Ceramic Cup) 6 Pulse Plating Capability; Advanced Energy Pulse Power Supply 7 Three Additive Dosing System with Nowpak 8 Bath Chemistry control algorithm 9 Central Bath Reservoir (150 L) servicing all three plating modules 10 At least two Post-Electrofill Modules; capable of Edge Bead Removal (EBR) 11 At least two-chamber anneal capability: 50-400 C, H2/forming gas 12 Brooks 4-axis atmospheric dual-end effector robot (process robot) 13 Brooks Accutran front-end robot 14 Main Power Panel 15 Secondary containment with splash guards and leak detection 16 Dual waste stream plumbing for dedicated plating solution reclaim and dilute rinse 17 Pentium or better-based CPU 18 Graphical User Interface (GUI) 19 SECS/GEM compatibilityOEM 型号描述
The NOVELLUS SABRE xT is a tool used for electrofilling that is part of the second generation of SABRE tools. It is designed to provide void-free fill in 0.13-micron geometries with aspect ratios up to 10:1. The SABRE xT is a “bridge tool” that can process either 200 or 300 mm wafers. It incorporates process enhancements in the areas of electrical waveforms, advanced bath chemistries, and automated chemical monitoring and control using Novellus’ proprietary SmartDose algorithm. The SABRE xT can process up to 75 wafers per hour and has achieved within-wafer uniformity performance of less than 2% 1 sigma and wafer-to-wafer uniformity of less than 1% 1 sigma in a production environment.文件
LAM RESEARCH / NOVELLUS
SABRE xT
已验证
类别
Electro Plating
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
109980
晶圆尺寸：
8"/200mm
年份：
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
LAM RESEARCH / NOVELLUS
SABRE xT
类别
Electro Plating
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
Deinstalled
产品编号：
109980
晶圆尺寸：
8"/200mm
年份：
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available