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说明
Sputter-up method High-frequency magnetron discharge Target distance 40 to 40 mm Holder 3 Number of substrates mounted 4 Maximum heating temperature 300°C Chamber dimensions φ450x220H Substrate holder dimensions φ350配置
无配置OEM 型号描述
Sputtering system文件
无文件
SHIMADZU
HSR-521A
类别
Electronic Test
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
71025
晶圆尺寸：
未知
年份：
1991
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Sputter-up method High-frequency magnetron discharge Target distance 40 to 40 mm Holder 3 Number of substrates mounted 4 Maximum heating temperature 300°C Chamber dimensions φ450x220H Substrate holder dimensions φ350配置
无配置OEM 型号描述
Sputtering system文件
无文件