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SE-3000
概述
Microspot Spectroscopic Ellipsometer Microspot spectroscopic ellipsometer of Semilab are capable of fully automated characterization of patterned, compound or (O)LED 300mm samples. Primary applications: - Front-end applications - Production wafer monitoring - Process development - Advanced Process Control: - Across wafer uniformity - Wafer to wafer uniformity - Batch to batch uniformity
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检验、保险、评估、物流
