说明
无说明配置
AS-IS AMAT Centura HTF 3ch Epi system, ATM ‐ 200mm ‐ Centura 5200 HTF Toxic Epi mainframe - 480V/60Hz/600A - Wide Body ENP loadlocks ‐ Wafer mapping ‐ HP robot ‐ Remote Centerfinding ‐ Epi chamber RP Position: A, B, C * R3.4 rotation assy * Variable Speed Blower ‐ Single slot non-contact cooldown chamber, position F ‐ Legacy Gas Panel (USED) * H2 Slit - 20 SLM * H2 Main - 100 SLM * HCL - 1 SLM * DCS - 1 SLM (Not Used, was RP tool) * MixDop - 300 SCCM * TCS - 30 SLM * Direct Dop - 500 SCCMOEM 型号描述
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.文件
无文件
类别
Epitaxial deposition (EPI)
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
67521
晶圆尺寸：
未知
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA 5200 HTF
类别
Epitaxial deposition (EPI)
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
67521
晶圆尺寸：
未知
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
无说明配置
AS-IS AMAT Centura HTF 3ch Epi system, ATM ‐ 200mm ‐ Centura 5200 HTF Toxic Epi mainframe - 480V/60Hz/600A - Wide Body ENP loadlocks ‐ Wafer mapping ‐ HP robot ‐ Remote Centerfinding ‐ Epi chamber RP Position: A, B, C * R3.4 rotation assy * Variable Speed Blower ‐ Single slot non-contact cooldown chamber, position F ‐ Legacy Gas Panel (USED) * H2 Slit - 20 SLM * H2 Main - 100 SLM * HCL - 1 SLM * DCS - 1 SLM (Not Used, was RP tool) * MixDop - 300 SCCM * TCS - 30 SLM * Direct Dop - 500 SCCMOEM 型号描述
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.文件
无文件