说明
Dry etch system配置
Known issues: Not included: Pumps; Chillers; Abatement Centura Mainframe (Qty 2) SiCoNi Chamber Brooks Back End Robot 5.X Yaskawa FI Robot (Qty 2) Batch Loadlocks (Qty 2) FOUP Factory Interface FI Robot Controller (Qty 2) Siconi Lid TC Buffer Throttle Valve Slit Actuator Blank-off Plate (Qty 2) Cooldown Station Assy Loadlock Cover (Qty 2) Buffer CDN Cards Siconi Isolator FI Aligner Siconi RF Ballast Siconi Controller Tower Buffer Power Supply (Qty 2) Siconi Lid Heater Driver Siconi Electrode (Qty 2) Siconi Pneumatic Block Siconi Crossover Gas Line Siconi Chamber Blank-off Plate Process: SiCoNi CIM: SECS/GEMOEM 型号描述
未提供文件
无文件
类别
Epitaxial deposition (EPI)
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154777
晶圆尺寸：
12"/300mm
年份：
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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APPLIED MATERIALS (AMAT)
CENTURA ACP
类别
Epitaxial deposition (EPI)
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154777
晶圆尺寸：
12"/300mm
年份：
2009
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Dry etch system配置
Known issues: Not included: Pumps; Chillers; Abatement Centura Mainframe (Qty 2) SiCoNi Chamber Brooks Back End Robot 5.X Yaskawa FI Robot (Qty 2) Batch Loadlocks (Qty 2) FOUP Factory Interface FI Robot Controller (Qty 2) Siconi Lid TC Buffer Throttle Valve Slit Actuator Blank-off Plate (Qty 2) Cooldown Station Assy Loadlock Cover (Qty 2) Buffer CDN Cards Siconi Isolator FI Aligner Siconi RF Ballast Siconi Controller Tower Buffer Power Supply (Qty 2) Siconi Lid Heater Driver Siconi Electrode (Qty 2) Siconi Pneumatic Block Siconi Crossover Gas Line Siconi Chamber Blank-off Plate Process: SiCoNi CIM: SECS/GEMOEM 型号描述
未提供文件
无文件