说明
300MM ASME 3000 EPI HEX配置
-Software Version: Standard -CIM: SECS GEM -Process: EPI -Main System Main Tool -Handler System Standard (1) -Factory Interface FOUP (4) -Others Upgrades 2006-2011 Mass Flow Verification Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ( CMD1) ASM EPI Backpressue U/G (4)OEM 型号描述
未提供文件
无文件
ASM
EPSILON E3000
已验证
类别
Epitaxial deposition (EPI)
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
112988
晶圆尺寸:
12"/300mm
年份:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASM
EPSILON E3000
类别
Epitaxial deposition (EPI)
上次验证: 60 多天前
物品主要详细信息
状况:
Used
运行状况:
未知
产品编号:
112988
晶圆尺寸:
12"/300mm
年份:
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
300MM ASME 3000 EPI HEX配置
-Software Version: Standard -CIM: SECS GEM -Process: EPI -Main System Main Tool -Handler System Standard (1) -Factory Interface FOUP (4) -Others Upgrades 2006-2011 Mass Flow Verification Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ( CMD1) ASM EPI Backpressue U/G (4)OEM 型号描述
未提供文件
无文件