说明
300MM ASME 3000 EPI HEX配置
-Software Version: Standard -CIM: SECS GEM -Process: EPI -Main System Main Tool -Handler System Standard (1) -Factory Interface FOUP (4) -Others Upgrades 2006-2011 Mass Flow Verification Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ( CMD1) ASM EPI Backpressue U/G (4)OEM 型号描述
未提供文件
无文件
ASM
EPSILON E3000
已验证
类别
Epitaxial deposition (EPI)
上次验证： 29 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
112988
晶圆尺寸：
12"/300mm
年份：
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASM
EPSILON E3000
类别
Epitaxial deposition (EPI)
上次验证： 29 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
112988
晶圆尺寸：
12"/300mm
年份：
2003
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
300MM ASME 3000 EPI HEX配置
-Software Version: Standard -CIM: SECS GEM -Process: EPI -Main System Main Tool -Handler System Standard (1) -Factory Interface FOUP (4) -Others Upgrades 2006-2011 Mass Flow Verification Upgrades on CMD1 ASM EPI PRE ALIGNER U/G CMD1 ASM CONTROL UPGRADE ON EPI TOOL ( CMD1) ASM EPI Backpressue U/G (4)OEM 型号描述
未提供文件
无文件