说明
EPI Reactors配置
Epitaxial Reactor PE106 Argon Line H2 Line SiHCI3 (Silicon Source) with Bubbler and thermal controller N Type Dope Line C2H4 (Etylene Carbon Source) Box Description: 1. nr. 1 Carriage Module 2. nr. 1 Reactor Module 3. nr. 1 Power generator 4. nr. 1 Trolley for PC nr. 2 UPS nr. 1 PC + Monitor nr. 1Coaxial cables nr. 1 Accessories nr. Panel reactor 5. nr. 1 set of quartz/graphite pieces Reactor 6. nr. 1 Process Pump EB ara 7. nr. 1 Bubbler STD cod.16G702/R-3061 8. nr. 1 Thermochiller 9. nr. 1 Reaction chamber 10. nr. Cabinet BubblerOEM 型号描述
未提供文件
无文件
LPE
PE106A
类别
Epitaxial deposition (EPI)
上次验证： 14 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
143464
晶圆尺寸：
未知
年份：
2020
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
EPI Reactors配置
Epitaxial Reactor PE106 Argon Line H2 Line SiHCI3 (Silicon Source) with Bubbler and thermal controller N Type Dope Line C2H4 (Etylene Carbon Source) Box Description: 1. nr. 1 Carriage Module 2. nr. 1 Reactor Module 3. nr. 1 Power generator 4. nr. 1 Trolley for PC nr. 2 UPS nr. 1 PC + Monitor nr. 1Coaxial cables nr. 1 Accessories nr. Panel reactor 5. nr. 1 set of quartz/graphite pieces Reactor 6. nr. 1 Process Pump EB ara 7. nr. 1 Bubbler STD cod.16G702/R-3061 8. nr. 1 Thermochiller 9. nr. 1 Reaction chamber 10. nr. Cabinet BubblerOEM 型号描述
未提供文件
无文件