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说明
MBE system includes: - growth chamber: substrate rotation unit, all 8 shutter mechanisms - ion pump - load chamber/transition tube and 2 transfer arms - manual gate valves between growth chamber, load chamber, ion pump, manifold, etc - heating elements and blanket insulation for baking the system配置
无配置OEM 型号描述
未提供文件
无文件
RIBER
32
类别
Epitaxial deposition (EPI)
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
114277
晶圆尺寸：
3"/75mm
年份：
未知
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说明
MBE system includes: - growth chamber: substrate rotation unit, all 8 shutter mechanisms - ion pump - load chamber/transition tube and 2 transfer arms - manual gate valves between growth chamber, load chamber, ion pump, manifold, etc - heating elements and blanket insulation for baking the system配置
无配置OEM 型号描述
未提供文件
无文件