说明
Remaining parts for tool1: Transfer robot Missing parts for tool 1: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computer 4.EC&AC magnetron generator 5.EC turbo pump & controller 6.LL/UL cassette motor 7.AC gate cylinder Remaining parts for tool 2: 1.Transfer robot 2.LL system 3.EC chamber system 4.AC chamber system Missing parts for tool 2: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computer配置
无配置OEM 型号描述
未提供文件
无文件
HITACHI
M 308AE
类别
Etch/Asher
上次验证： 60 多天前
物品主要详细信息
状况：
Parts Tool
运行状况:
未知
产品编号：
133660
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Remaining parts for tool1: Transfer robot Missing parts for tool 1: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computer 4.EC&AC magnetron generator 5.EC turbo pump & controller 6.LL/UL cassette motor 7.AC gate cylinder Remaining parts for tool 2: 1.Transfer robot 2.LL system 3.EC chamber system 4.AC chamber system Missing parts for tool 2: 1.Chamber process kit 2.Chiller/pump/scrubber 3.Micro computer配置
无配置OEM 型号描述
未提供文件
无文件