说明
• Versatile ICP etcher to anisotropically etch most thin film material(s) • Two 5kW 2.45GHz microwave power supplies coupled to 4 independent wave guides deliver high-density free radicals for a gentle chemical etch. • 13.56 MHz power supply powers the cathode to provides bias for anisotropy • Manual load: (3) 6' wafers onto the carrier. then into UL • L/L & process chamber equipped with roughing pump and turbo • Process gases: BC. Cl2. CF4, SF6, C4Fs, 02. & Ar配置
无配置OEM 型号描述
未提供文件
无文件
类别
Etch/Asher
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
135817
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
MEYER BURGER
AP 800
类别
Etch/Asher
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
135817
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
• Versatile ICP etcher to anisotropically etch most thin film material(s) • Two 5kW 2.45GHz microwave power supplies coupled to 4 independent wave guides deliver high-density free radicals for a gentle chemical etch. • 13.56 MHz power supply powers the cathode to provides bias for anisotropy • Manual load: (3) 6' wafers onto the carrier. then into UL • L/L & process chamber equipped with roughing pump and turbo • Process gases: BC. Cl2. CF4, SF6, C4Fs, 02. & Ar配置
无配置OEM 型号描述
未提供文件
无文件