说明
PECVD配置
With: - Advanced Energy Generator - Edwards Dry Pump - Backing Pump - Gas Cabinet - RF SupplyOEM 型号描述
STS Multiplex is a type of etcher that offers a large range of materials etching possibility such as insulators (SiO2, Si3N4 and SiC), silicon, metals (Al Alloys, Pt, Ti) and some polymers. It is dedicated for etching metals (processes under chlorine chemistry), quartz (fluorine/carbonate chemistry) and polyimide (oxygen chemistry). STS offers a range of different platform options, each compatible with all STS process technologies. The Multiplex has a single process chamber with manually loaded vacuum loadlock and carousel wafer handler for 2-4 wafers.文件
无文件
STS
MULTIPLEX
已验证
类别
Etch/Asher
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
50439
晶圆尺寸：
未知
年份：
未知
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
STS
MULTIPLEX
已验证
类别
Etch/Asher
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
50439
晶圆尺寸：
未知
年份：
未知
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
PECVD配置
With: - Advanced Energy Generator - Edwards Dry Pump - Backing Pump - Gas Cabinet - RF SupplyOEM 型号描述
STS Multiplex is a type of etcher that offers a large range of materials etching possibility such as insulators (SiO2, Si3N4 and SiC), silicon, metals (Al Alloys, Pt, Ti) and some polymers. It is dedicated for etching metals (processes under chlorine chemistry), quartz (fluorine/carbonate chemistry) and polyimide (oxygen chemistry). STS offers a range of different platform options, each compatible with all STS process technologies. The Multiplex has a single process chamber with manually loaded vacuum loadlock and carousel wafer handler for 2-4 wafers.文件
无文件