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说明
Sitting idle, less chlorine gasses, and can fired up if need be.配置
Gas cabinents, BOSCH pumps, scrubber included EDWARDS ATLAS MK3B, Manual load station, elevated staging, RF generator 30Kilowat Kyosan, 480 volt power Rough throughput 1800 wafers assuming 156mmx156mm uptime >94% Setup for SF6, CL, O2 gases Equipment tray footprint 3500mm x 8750mm x 3620mmOEM 型号描述
RIE(Reactive lon Etch) & Manual Loader文件
无文件
类别
Etch/Asher
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
63639
晶圆尺寸：
未知
年份：
2014
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
WONIK IPS
Helitex AAS0
类别
Etch/Asher
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
63639
晶圆尺寸：
未知
年份：
2014
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Sitting idle, less chlorine gasses, and can fired up if need be.配置
Gas cabinents, BOSCH pumps, scrubber included EDWARDS ATLAS MK3B, Manual load station, elevated staging, RF generator 30Kilowat Kyosan, 480 volt power Rough throughput 1800 wafers assuming 156mmx156mm uptime >94% Setup for SF6, CL, O2 gases Equipment tray footprint 3500mm x 8750mm x 3620mmOEM 型号描述
RIE(Reactive lon Etch) & Manual Loader文件
无文件