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Max Temperature 1200ºC 3ea MRL “Black Max” #400-95705 Heating Elements with Spike Thermocouples Furnace Tube 11.0” (i.d.) X 15.5” (o.d.) X 54” (l); 240V, 3 Ph, 22.1 KW Load Zone – 16.0” (l); 10.5 KW Center Zone – 20.0” (l); 6.3 KW Source Zone – 8.0” (l); 5.3 KW 3ea EUROTHERM Model FICS-11 Temperature Controllers 3ea BURLING INSTRUMENTS Platinel II OTP Controllers Miscellaneous Profile Thermocouples Available MRL Automatic Loading Station with 3ea DIRECTION, INC. Cantilever Wafer Loaders MRL GPM Gas Control Cabinet Furnace Tube 1 – 3ea UNIT Model UFC-1100A MFCs Gas #1: N2 – 10 SLM Gas #2: O2 – 10 SLM Gas #3: N2 – 1 SLM Furnace Tube 2 – 2ea UNIT Model UFC-1100A MFCs Gas #1: N2 – 10 SLM Gas #2: O2 – 10 SLM Furnace Tube 3 – 1ea UNIT Model UFC-1100A MFC Gas #1: N2 – 10 SLM 3ea ARGUS Gas Control Modules 2ea J.C. SCHUMACHER Model 100 Source Temperature Control Systems Upgraded with a PLC Controller配置
无配置OEM 型号描述
未提供文件
无文件
MRL
1024
类别
Furnaces / Diffusion
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
21452
晶圆尺寸：
6"/150mm
年份：
未知
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Refurbishment Services
Available
说明
Max Temperature 1200ºC 3ea MRL “Black Max” #400-95705 Heating Elements with Spike Thermocouples Furnace Tube 11.0” (i.d.) X 15.5” (o.d.) X 54” (l); 240V, 3 Ph, 22.1 KW Load Zone – 16.0” (l); 10.5 KW Center Zone – 20.0” (l); 6.3 KW Source Zone – 8.0” (l); 5.3 KW 3ea EUROTHERM Model FICS-11 Temperature Controllers 3ea BURLING INSTRUMENTS Platinel II OTP Controllers Miscellaneous Profile Thermocouples Available MRL Automatic Loading Station with 3ea DIRECTION, INC. Cantilever Wafer Loaders MRL GPM Gas Control Cabinet Furnace Tube 1 – 3ea UNIT Model UFC-1100A MFCs Gas #1: N2 – 10 SLM Gas #2: O2 – 10 SLM Gas #3: N2 – 1 SLM Furnace Tube 2 – 2ea UNIT Model UFC-1100A MFCs Gas #1: N2 – 10 SLM Gas #2: O2 – 10 SLM Furnace Tube 3 – 1ea UNIT Model UFC-1100A MFC Gas #1: N2 – 10 SLM 3ea ARGUS Gas Control Modules 2ea J.C. SCHUMACHER Model 100 Source Temperature Control Systems Upgraded with a PLC Controller配置
无配置OEM 型号描述
未提供文件
无文件