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Description L W H Qty LOADER CABINET 36 25 110 1 MAIN BODY 36 50 82.5 1 UTILITY CABINET 24 38 110 1 PALLET-1 (MAIN BODY UPPER) 36 50 27,5 1 PALLET-2, (CASSETTE BUFFER RACK, HEPA FILTER, PANELS)48 40 37 1 PALLET-3, (HEATER ELEMENT, TOP HAT) 48 40 58 1 PALLET-4, (PANELS, GAS LINES, MISCELLANEOUS PARTS) 48 40 24 1 PROCESS EXHAUST 11 6 121 1配置
OEM : Tokyo Electron MODEL : Alpha-8S-ZA Process : O2 Anneal, Dry Oxide Controller/Software : TS4000Z Reserved batch operation : Possible Number of Product Wafers : 150 Wafer Shape : SNNF (Semi Notch No Flat) Wafer Cassette : 8" Plastic SMIF Interface : NO GAS Capabilities : N2, O2 Gas Pattern Panel : See Photo on Page 2 Heater : Included Heater Zone : 5 zone Control Thermocouple : Paddle Max Temperature : 1100 C Place of control Thermocouple : between outer tube and inner tube Pump : NA Scrubber : None Pressure control : NA N2 Load Lock : No Boat rotation No Spike TC’s and OT TC’s Included (5) End Effectors IncludedOEM 型号描述
The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other options文件
类别
Furnaces / Diffusion
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127807
晶圆尺寸：
8"/200mm
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
ALPHA-8S
类别
Furnaces / Diffusion
上次验证： 30 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
127807
晶圆尺寸：
8"/200mm
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available