说明
Install Type: Through-the-wall System Status: On-Line (operational at time of inspection) Wafer Production (AS IS): Yes - system can produce wafers in current condition Known Field Modifications: None All Cables Present: Yes Process Name: Oxide • Front Surface Finish: White • Process Pressure: Atmospheric • Number of Zones: 5 • Temperature Controller: Model 121 • Inner TC Type: In-line • Rapid Cooling Unit: No • Boat Rotation: Yes • Signal Lamp Tower: Yes • Gas Leak Detection: Yes Wafer Handling • Wafer Size: 8 inch (200 mm) • Wafer Type: Notch • Number of Slots: 26 • Bolt-On SMIF: No • Integrated SMIF: No • Stocker: 21-slot carrier • N2 Purge System: Yes Control & Software • System Controller: TS-4000Z • Software Version: V07.06 • Date of Last PM: 2020 (last use) • Temperature Range: 960 °C (max. 1025 °C) • FTP Heater: No Transfer & Sensing • Tube Seal: Lip Seal • Transfer Stage: Equipped • Wafer Position Sensor: Yes • Fork Wafer Present Sensor: Yes • Notch Alignment: No (function not in use) • Fork Wafer Position Sensor: Yes配置
ATM OxideOEM 型号描述
The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other options文件
类别
Furnaces / Diffusion
上次验证： 25 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
136981
晶圆尺寸：
8"/200mm
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ALPHA-8S
类别
Furnaces / Diffusion
上次验证： 25 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
136981
晶圆尺寸：
8"/200mm
年份：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available