说明
8* VERTICAL LPCVD SYSTEM FOR LPCVD POLY PROCESS配置
TEL ALPHA-808SOEM 型号描述
The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other options文件
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TEL / TOKYO ELECTRON
ALPHA-8S
已验证
类别
Furnaces / Diffusion
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
105359
晶圆尺寸：
8"/200mm
年份：
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
ALPHA-8S
类别
Furnaces / Diffusion
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
105359
晶圆尺寸：
8"/200mm
年份：
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
8* VERTICAL LPCVD SYSTEM FOR LPCVD POLY PROCESS配置
TEL ALPHA-808SOEM 型号描述
The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other options文件
无文件