说明
ALPHA-8S-Z配置
NO Module Name Status General Configuration Available None 1 Process F-POLY 2 Wafer Size 200mm 3 Process Wafer Qty N/A 4 Process Type SiH4-POLY 5 I/O Port / Smif FOUP 6 Load Lock N/A 7 Carriet Slor 25 Slot System Control Available None 1 System Controller TS 4000Z - 7S 2 Operation Screen Button 3 Gas Flow Chart (Fornt & Rear)◎ ◎ 4 Temperature Controller M-121 CTR 5 Vacuum Pressure Control MKS VEC 6 Controller Transformer 1Φ 100V 7 Heater Transformer 3Φ 208V 8 Oxygen Analyzer N/A 9 HEC Pyro Ctl N/A NO Module Name Status Remark Process Gasses Available None 1 Process Gas 1 N2 2 Process Gas 2 SiH4 3 Process Gas 3 --- 4 Process Gas 4 --- 5 Process Gas 5 --- 6 Process Gas 6 --- 7 Process Gas 7 --- Gas Distrubution System Available None 1 Basic Style Conventinal 2 Tubing Matrial SUS-316L 3 Tubing Finish VCR 4 Manual Valve Fujikin 5 Air-Operated Valve Fujikin 6 MFC Area Exhaust Distribution System Available None 1 Air-Operated Valve Type VCR Connect 2 Main Valve MKS VEC 3 Cold Trap ◎ 4 Pump Line ◎ Wafer/Cassette Handling Available None 1 Wafer Alignment ◎ 2 Casstte Storage Qty 16 3 Casstte In/Out Port ◎ 4 Casstte Handling Robot ◎ 5 Wafer Transfer Type 1 + 4 6 Fork Matrial AL2O3 7 Fork Qty 5 8 Fork Variable Pitch ◎ 9 Fork Wafer Presence Sensor ◎ Elevator Handling Available None 1 Boat Elevator ◎ 2 Auto Shutter ◎ 3 Boat Rotation ◎ 4 Mechanical Parts ◎ Heating Chamber Available None 1 Heater Type VMM-40-101 2 T/C Type 5 3 Spike T/C 5OEM 型号描述
The ALPHA-8S is a popular batch thermal processing system for silicon wafers up to 200mm in size. It has been continuously improved to maximize efficiency and productivity, setting the standard for vertical furnaces. The system is versatile, supporting a wide range of process applications such as Wet/Dry Oxidation, Anneal, and LPCVD of Si, Si3N4, and SiO2. Additionally, various types of Up Grade Kits (UGK) are available to enhance productivity and extend the product’s life, including a GUI controller and other options文件
类别
Furnaces / Diffusion
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
128776
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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ALPHA-8S
类别
Furnaces / Diffusion
上次验证： 60 多天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
128776
晶圆尺寸：
8"/200mm
年份：
未知
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available