说明
Furnace (FTPS), host station Installed for ONO gate capability, process gases run under engineering.配置
-Base unit ONO process. -Type I deep bay frame -Waves controller -Wafer Diameter: 200 mm -Load: 170 slot boat (150 wfr load size) with boat rotaNon -Heater element: 500C – 1000C -Process gases: NH3, DCS, N2O, N2OEM 型号描述
The Alpha-8SE is a batch thermal processing system that covers multiple applications over a wide temperature range. It was introduced for 200mm wafer processing in the mid-1990s and has undergone continuous improvements to productivity, reliability, and stability. The Alpha-8SE supports 100/150/200mm wafer sizes and up to 150 wafer batch size for semiconductor thin film applications including oxidation & anneal, LPCVD of Si (Poly, a-Si), Si3N4, SiO2, and high-k ALD. It enables performance for today’s most advanced diffusion and deposition processes such as ALD (Atomic Layer Deposition), low-pressure radical oxidation, and low-temperature nitrides.文件
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TEL / TOKYO ELECTRON
ALPHA-8SE
已验证
类别
Furnaces / Diffusion
上次验证： 60 多天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
91212
晶圆尺寸：
6"/150mm, 8"/200mm
年份：
2018
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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TEL / TOKYO ELECTRON
ALPHA-8SE
类别
Furnaces / Diffusion
上次验证： 60 多天前
物品主要详细信息
状况：
Refurbished
运行状况:
未知
产品编号：
91212
晶圆尺寸：
6"/150mm, 8"/200mm
年份：
2018
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
Furnace (FTPS), host station Installed for ONO gate capability, process gases run under engineering.配置
-Base unit ONO process. -Type I deep bay frame -Waves controller -Wafer Diameter: 200 mm -Load: 170 slot boat (150 wfr load size) with boat rotaNon -Heater element: 500C – 1000C -Process gases: NH3, DCS, N2O, N2OEM 型号描述
The Alpha-8SE is a batch thermal processing system that covers multiple applications over a wide temperature range. It was introduced for 200mm wafer processing in the mid-1990s and has undergone continuous improvements to productivity, reliability, and stability. The Alpha-8SE supports 100/150/200mm wafer sizes and up to 150 wafer batch size for semiconductor thin film applications including oxidation & anneal, LPCVD of Si (Poly, a-Si), Si3N4, SiO2, and high-k ALD. It enables performance for today’s most advanced diffusion and deposition processes such as ALD (Atomic Layer Deposition), low-pressure radical oxidation, and low-temperature nitrides.文件
无文件