说明
CVD system配置
Known issues: Not included: (Qty 2) Eurotherm Temp; TM Robot Blade; (Qty 3) Chuck Heater EFEM with Loadlocks and Buffer Ulvac Covot-6 VAC Robot Handler (Qty 3) FOUP Factory Interface Process: SiON Software Version: GF.2.4.2_100 CIM: SECS (Qty 3) ChambersOEM 型号描述
未提供文件
无文件
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WONIK IPS
MAHA MP
类别
Gas Cabinets
上次验证： 6 天前
物品主要详细信息
状况：
Used
运行状况:
未知
产品编号：
154812
晶圆尺寸：
12"/300mm
年份：
2019
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
说明
CVD system配置
Known issues: Not included: (Qty 2) Eurotherm Temp; TM Robot Blade; (Qty 3) Chuck Heater EFEM with Loadlocks and Buffer Ulvac Covot-6 VAC Robot Handler (Qty 3) FOUP Factory Interface Process: SiON Software Version: GF.2.4.2_100 CIM: SECS (Qty 3) ChambersOEM 型号描述
未提供文件
无文件