说明

Thermo Neslab Steelhead 0 AMAT Thermal Fluid Recirculating Heat Exchanger ***This unit is sold as-is, where-is. It is untested.*** Typical Semiconductor Applications: Dry etch - plasma (e.g. RF/Microwave) Wet etch Dry deposition (e.g. CVD, SACVD, PVD) Wet deposition (e.g. ECP) Ion implantation Plasma asher Planarization Components: Chamber walls Cathodes Domes Upper/lower electrodes Chucks/disks Ozone generators Cleaning baths and plating tanks RF power supplies Reliable Performance: Proven quality Extended DI life Next Generation AMAT 0 Description: The heat exchange system consists of a thermal fluid recirculating system which provides a constant fluid flow. A second loop consists of a facilities water loop which recirculates through a plate heat exchanger for fluid cooling. A 6 kilowatt heater is located in the fluid recirculating system. The recirculating fluid loop has a deionizing package with a replaceable cartridge and a 20 micron particulate filter with a replaceable filter element. (cartridges not provided unless shown)

配置

The Unit's Serial Number Tag Reads: Model: STEELHEAD 0 BOM Number: 620000000015 Serial Number: 197178004 Power Requirements: 200-208 VAC, 3-Phase, 50/60 Hz, 23/25 A Heater Capacity: 6 kW @ 208 VAC Pump Capacity: 3 HP Weight: 385 lbs. (174 kg) CE Marked: Yes Specifications: Temperature Range: +30°C to 85°C (+86°F to +125°F) Cooling Capacity: 8 kW @ 5 GPM Number of Channels: 4 (2 GPM per channel) Materials: Brass, copper, stainless Pump Performance @ 60 Hz: 30 LPM @ 5.5 bar (8 GPM @ 80 psi) Compliance: CE, IBM Safety standards including EMO Reservoir Volume: 5 gallon (19 liter) Unit Dimensions: 30.25" H x 20.25" W x 29.25" D (76.8 cm x 51.4 cm x 74.3 cm) Power Requirements: 50 Hz: 200/208 VAC, 3-Phase, 23 A 60 Hz: 200/208 VAC, 3-Phase, 25 A Plumbing Connections: Inlet/Outlet: 1/2" Quick disconnects Drain: 1/2" Female NPT Unit Weight: 166 lbs (365 kg) (I think this is reversed as the tag says the opposite) Serial Communications: Analog, Digital